The Effect of N2 for Dry Etching Induced Damage of HgCdTe

GONG Xiao-dan, HAN Fu-zhong. The Effect of N2 for Dry Etching Induced Damage of HgCdTe[J]. Infrared Technology , 2015, (4): 315-321,322.

Citation:

GONG Xiao-dan, HAN Fu-zhong. The Effect of N2 for Dry Etching Induced Damage of HgCdTe[J]. Infrared Technology , 2015, (4): 315-321,322.

Citation:

GONG Xiao-dan, HAN Fu-zhong. The Effect of N2 for Dry Etching Induced Damage of HgCdTe[J]. Infrared Technology , 2015, (4): 315-321,322.

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