Micro-coolers Based on MEMS Technology

Micro-electro-mechanical systems (MEMS) are a new type of high-tech devices that combine microelectronics and mechanical engineering technology. Their manufacturing process can be highly integrated and conducted at the minimum nanometer scale. MEMS products also require corresponding refrigeration solutions because of their small volume, high integration, high performance, and high heat production. This study focuses on micro-semiconductors and Joule-Thomson (JT) coolers fabricated via MEMS technology that can also be applied to MEMS products. The working principles, performance, and development trends of the micro-coolers are discussed, and the advantages and disadvantages of micro-semiconductors and JT coolers are analyzed, respectively. Additionally, certain suggestions regarding the future development of micro-coolers are provided