ZHAO Li-Jun, OU Wen, YAN Jian-Hua, MING An-Jie, YUAN Feng, XIA Yan. Fabrication of a Thermopile Infrared Detector That Compatible with CMOS Process[J]. Infrared Technology , 2012, 34(2): 89-94. DOI: 10.3969/j.issn.1001-8891.2012.02.006
Citation: ZHAO Li-Jun, OU Wen, YAN Jian-Hua, MING An-Jie, YUAN Feng, XIA Yan. Fabrication of a Thermopile Infrared Detector That Compatible with CMOS Process[J]. Infrared Technology , 2012, 34(2): 89-94. DOI: 10.3969/j.issn.1001-8891.2012.02.006

Fabrication of a Thermopile Infrared Detector That Compatible with CMOS Process

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