SUN Yan-jun, LENG Yan-bing, CHEN Zhe, DONG Lian-he. Study on Optical Property and Fabrication of Silicon-based Free-form Micro-lens Array[J]. Infrared Technology , 2012, 34(1): 44-47. DOI: 10.3969/j.issn.1001-8891.2012.01.009
Citation: SUN Yan-jun, LENG Yan-bing, CHEN Zhe, DONG Lian-he. Study on Optical Property and Fabrication of Silicon-based Free-form Micro-lens Array[J]. Infrared Technology , 2012, 34(1): 44-47. DOI: 10.3969/j.issn.1001-8891.2012.01.009

Study on Optical Property and Fabrication of Silicon-based Free-form Micro-lens Array

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