FAN Mao-yan, JIANG Sheng-lin, ZHANG li-fang. Research on Wet Etching of Microbridge for Ferroelectric Thick Film Focal Plane Detector[J]. Infrared Technology , 2011, 33(5): 296-300,308. DOI: 10.3969/j.issn.1001-8891.2011.05.012
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Citation:
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FAN Mao-yan, JIANG Sheng-lin, ZHANG li-fang. Research on Wet Etching of Microbridge for Ferroelectric Thick Film Focal Plane Detector[J]. Infrared Technology , 2011, 33(5): 296-300,308. DOI: 10.3969/j.issn.1001-8891.2011.05.012
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FAN Mao-yan, JIANG Sheng-lin, ZHANG li-fang. Research on Wet Etching of Microbridge for Ferroelectric Thick Film Focal Plane Detector[J]. Infrared Technology , 2011, 33(5): 296-300,308. DOI: 10.3969/j.issn.1001-8891.2011.05.012
|
Citation:
|
FAN Mao-yan, JIANG Sheng-lin, ZHANG li-fang. Research on Wet Etching of Microbridge for Ferroelectric Thick Film Focal Plane Detector[J]. Infrared Technology , 2011, 33(5): 296-300,308. DOI: 10.3969/j.issn.1001-8891.2011.05.012
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