Study on the Photoluminescence Properties of Ge/Si multilayer Films Deposited by Magnetron Sputtering

SONG Chao; KONG Ling-de; YANG Yu

doi:10.3969/j.issn.1001-8891.2007.02.002

SONG Chao, KONG Ling-de, YANG Yu. Study on the Photoluminescence Properties of Ge/Si multilayer Films Deposited by Magnetron Sputtering[J]. Infrared Technology , 2007, 29(2): 67-70. DOI: 10.3969/j.issn.1001-8891.2007.02.002

Citation:

SONG Chao, KONG Ling-de, YANG Yu. Study on the Photoluminescence Properties of Ge/Si multilayer Films Deposited by Magnetron Sputtering[J]. Infrared Technology , 2007, 29(2): 67-70. DOI: 10.3969/j.issn.1001-8891.2007.02.002

Citation:

SONG Chao, KONG Ling-de, YANG Yu. Study on the Photoluminescence Properties of Ge/Si multilayer Films Deposited by Magnetron Sputtering[J]. Infrared Technology , 2007, 29(2): 67-70. DOI: 10.3969/j.issn.1001-8891.2007.02.002

Study on the Photoluminescence Properties of Ge/Si multilayer Films Deposited by Magnetron Sputtering

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Study on the Photoluminescence Properties of Ge/Si multilayer Films Deposited by Magnetron Sputtering

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