XIA Li-kun, HOU Yang, LI Yin-zhu, TAI Yun-jian, YAN jun, MO Qi-yuan. PID Control Technology in the Laser Etching System for Ferroelectric Materials[J]. Infrared Technology , 2006, 28(8): 489-492. DOI: 10.3969/j.issn.1001-8891.2006.08.014
Citation: XIA Li-kun, HOU Yang, LI Yin-zhu, TAI Yun-jian, YAN jun, MO Qi-yuan. PID Control Technology in the Laser Etching System for Ferroelectric Materials[J]. Infrared Technology , 2006, 28(8): 489-492. DOI: 10.3969/j.issn.1001-8891.2006.08.014

PID Control Technology in the Laser Etching System for Ferroelectric Materials

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