HE Wen-jin, YANG Pei-zhi, TAI Yun-jian, YANG Chun-li, YUAN Jun, YANG Yu. Research on Sacrificial Layers Fabrication in Uncooled Infrared Focal Plane Array[J]. Infrared Technology , 2006, 28(1): 19-22. DOI: 10.3969/j.issn.1001-8891.2006.01.005
Citation: HE Wen-jin, YANG Pei-zhi, TAI Yun-jian, YANG Chun-li, YUAN Jun, YANG Yu. Research on Sacrificial Layers Fabrication in Uncooled Infrared Focal Plane Array[J]. Infrared Technology , 2006, 28(1): 19-22. DOI: 10.3969/j.issn.1001-8891.2006.01.005

Research on Sacrificial Layers Fabrication in Uncooled Infrared Focal Plane Array

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